Method for inducing strain in vertical semiconductor columns

ABSTRACT

A vertical Metal-Oxide-Semiconductor (MOS) transistor includes a substrate and a nano-wire over the substrate. The nano-wire comprises a semiconductor material. An oxide ring extends from an outer sidewall of the nano-wire into the nano-wire, with a center portion of the nano-wire encircled by the oxide ring. The vertical MOS transistor further includes a gate dielectric encircling a portion of the nano-wire, a gate electrode encircling the gate dielectric, a first source/drain region underlying the gate electrode, and a second source/drain region overlying the gate electrode. The second source/drain region extends into the center portion of the nano-wire. Localized oxidation produces a local swelling in the structure that generates a tensile or compressive strain in the nano-wire.

BACKGROUND

Vertical Transistors are being researched recently. In a verticaltransistor, a vertical column, which may be a vertical nano-wire formedof a semiconductor material, is formed over a substrate, which may be abulk semiconductor wafer or a Semiconductor-On-Insulator (SOI) wafer. Agate dielectric and a gate electrode are formed to encircle thenano-wire, with the encircled portion of the nano-wire forming thechannel of the respective vertical transistor. A source and a drain areformed, with one underlying the channel, and the other overlying thechannel. The vertical transistor has a gate-all-around structure sincethe gate may fully encircle the channel. With the all-around gatestructure, the drive current of the vertical transistor is high andshort-channel effects are minimized.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the embodiments, and the advantagesthereof, reference is now made to the following descriptions taken inconjunction with the accompanying drawings, in which:

FIGS. 1A through 1Q are cross-sectional views of intermediate stages inthe manufacturing of a vertical NMOS transistor in accordance with someexemplary embodiments;

FIGS. 2A through 2G are cross-sectional views of intermediate stages inthe manufacturing of a vertical NMOS transistor in accordance withalternative exemplary embodiments;

FIGS. 3A through 3G are cross-sectional views of intermediate stages inthe manufacturing of a vertical PMOS transistor in accordance with someexemplary embodiments;

FIG. 4 illustrates a vertical NMOS structure that is used to simulatethe stress in NMOS transistors;

FIG. 5 illustrates the simulated stress in the vertical NMOS structure;

FIG. 6 illustrates a vertical PMOS structure that is used to simulatethe stress in PMOS transistors;

FIG. 7 illustrates the simulated stress in the vertical PMOS structure;

FIG. 8 illustrates stresses in a vertical transistor, which includes agermanium channel between two silicon regions; and

FIG. 9 illustrates the simulated stress in the vertical transistor shownin FIG. 8.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the embodiments of the disclosure are discussedin detail below. It should be appreciated, however, that the embodimentsprovide many applicable concepts that can be embodied in a wide varietyof specific contexts. The specific embodiments discussed areillustrative, and do not limit the scope of the disclosure.

Vertical Metal-Oxide-Semiconductor (MOS) transistors and the methods offorming the same are provided in accordance with various exemplaryembodiments. The intermediate stages of forming the vertical MOStransistors are illustrated in accordance with exemplary embodiments.The variations and the operation of the vertical MOS transistors arediscussed. Throughout the various views and illustrative embodiments,like reference numbers are used to designate like elements.

FIG. 1A illustrates the initial steps for forming a vertical MOStransistor. Substrate 20, which is a portion of a semiconductor wafer,is provided. Substrate 20 may be a semiconductor substrate such as asilicon substrate, although other materials such as silicon germanium,silicon carbon, and the like, may be used. Substrate 20 may also be abulk semiconductor substrate or a silicon-on-insulator substrate. Insome embodiments, substrate 20 is lightly-doped with a p-type impurity.Region 22 is formed in substrate 20, for example, through animplantation step. Region 22 may be one of the source region or thedrain region of the resulting vertical MOS transistor, and hence isreferred to as a first source/drain region hereinafter. Throughout thedescription, when a region is referred to as a “source/drain” region,the region may be a source region or a drain region. The firstsource/drain region 22 may be heavily doped with an n-type impurity suchas phosphorous, arsenic, and the like, for example, to an impurityconcentration between about 1×10¹⁹/cm³ and about 1×10²¹/cm³.

Nano-wire 26 is formed over substrate 20, wherein the first source/drainregion 22 may extend into nano-wire 26. In some embodiments, nano-wire26 has a horizontal dimension W1 between about 10 nm and about 40 nm. Itis appreciated, however, that the values recited throughout thedescription are merely examples, and may be changed to different values.The height H1 of nano-wire 26 may be between about 10 nm and about 45nm. Hard mask 28 is formed over nano-wire 26, and may comprise siliconnitride, although other materials such as silicon oxide or oxynitridemay be used. The formation of nano-wire 26 may include, after implantinga surface portion of substrate 20 to form source/drain region 22,performing an epitaxy to grow a semiconductor layer (such as silicon,silicon germanium, III-V semiconductor, or the like) over substrate 20,forming a hard mask layer over the epitaxy layer, and then patterningthe hard mask layer and the epitaxy layer to form hard mask 28 andnano-wire 26, respectively. The epitaxy layer may have a homogeneousstructure having a uniform material such as silicon or silicongermanium. Alternatively, the epitaxy layer may have a heterogeneousstructure including more than one layer. For example, portion 26C ofnano-wire 26 may be formed of germanium or silicon germanium, andportions 26A and 26B may be formed of silicon or silicon germanium. Inthe embodiments in which portions 26A, 26B, and 26C all include silicongermanium, the germanium percentage in portion 26C is greater than thegermanium percentage in portions 26A and 26B. In the patterning forforming nano-wire 26, a slightly over-etch may be performed, so that atop portion of substrate 20 forms a bottom portion of nano-wire 26. Therespective nano-wire 26 thus includes epitaxy portion 25 over firstsource/drain region 22. Epitaxy portion 25 may be a p-type region, anintrinsic region, or an n-type region, and may be in-situ doped duringthe epitaxy.

Referring to FIG. 1B, dielectric layer 30 is formed. In someembodiments, dielectric layer 30 comprises an oxide such as siliconoxide. The top surface of dielectric layer 30 is higher than hard mask28. Next, as shown in FIG. 1C, a Chemical Mechanical Polish (CMP) isperformed to level the top surface of dielectric layer 30 with the topsurface of hard mask 28. In a subsequent step, as shown in FIG. 1D, anetch-back is performed on dielectric layer 30, and dielectric layer 30is recessed. In some embodiments, the top surface of dielectric layer 30is level with or lower than the interface between source/drain region 22and epitaxy portion 25, although the top surface of dielectric layer 30may be higher than or at the same height as the interface.

FIG. 1E illustrates the formation of gate dielectric layer 32. In someembodiments, gate dielectric layer 32 is formed in a conformaldeposition process. Gate dielectric layer 32 may comprise a high-kdielectric material such as hafnium oxide, zirconium oxide, or the like.Other oxides and/or nitrides of Hf, Al, La, Lu, Zr, Ti, Ta, Ba, Sr,and/or the like, may also be used in gate dielectric layer 32. As shownin FIG. 1F, an etch step is then performed to remove the horizontalportions of gate dielectric layer 32, while the vertical portions ofgate dielectric layer 32 are left on the sidewalls of nano-wire 26.Next, gate electrode layer 34 is formed over gate dielectric layer 32,as also shown in FIG. 1F. Gate electrode layer 34 may include Al, Ti,Ta, W, Mo, Ru, Pt, Co, Ni, Pd, Nb, or alloys thereof. In otherembodiments, gate electrode layer 34 also includes metallic compoundsuch as TiN, TaC, or TaN.

FIG. 1G illustrates the formation of sacrificial oxide 36, which isdeposited to a level higher than the top surface of hard mask 28. A CMPis then performed to level the top surface of sacrificial oxide 36 withthe top surface of hard mask 28. As shown in FIG. 1H, etch-back stepsare then performed to remove the vertical portions of gate electrodelayer 34 and the exposed portions of gate dielectric layer 32. Theremoved portions of gate dielectric layer 32 are over the horizontalportion of gate electrode layer 34. The remaining vertical portion ofgate dielectric layer 32 is referred to as gate dielectric 32hereinafter.

Next, referring to FIG. 1I, gate electrode 34 is further patterned. Theremaining portion of gate electrode layer 34 is referred to as gateelectrode 34 hereinafter. Gate dielectric 32 and gate electrode 34 formthe gate stack of the resulting vertical MOS transistor. In a top viewof the structure in FIG. 1I, gate dielectric 32 and gate electrode 34encircle nano-wire 26.

Next, as shown in FIG. 1J, low-viscosity spacer 38 is formed on thesidewalls of nano-wire 26, and over gate electrode 34. Low-viscosityspacer 38 encircles, and is in contact with, the top portion ofnano-wire 26. The material of low-viscosity spacer 38 is selected, sothat at temperatures (for example, between about 400° C. and about1,000° C.) that are used in the subsequent oxidation of nano-wire 26,low-viscosity spacer 38 is at least softened to have certain viscosity,and hence stress may be generated more efficiently in nano-wire 26. Insome embodiments, low-viscosity spacer 38 comprises Boron-DopedPhospho-Silicate Glass (BPSG), silicon germanium oxide, or the like,which have melting and softening temperatures lower that of siliconoxide. Alternatively stated, when heated with gradually increasedtemperatures, low-viscosity spacer 38 becomes soft earlier than siliconoxide. Thickness T1 of low-viscosity spacer 38 may be between about 0.5nm and about 4 nm in accordance with exemplary embodiments.

FIG. 1K illustrates the formation of dielectric layer 40 and the CMPstep. In some embodiments, dielectric layer 40 comprises silicon oxide(SiO₂), although other dielectric materials may be used. Dielectriclayer 40 and low-viscosity spacer 38 are then etch back, as shown inFIG. 1L, and hence the top surfaces of dielectric layer 40 andlow-viscosity spacer 38 are recessed. Depth D1 of the resultingdielectric layer 40 and low-viscosity spacer 38 may have depth D1greater than about 2 nm, for example. The top portion of nano-wire 26thus protrudes over the top surface of dielectric layer 40.

In accordance with some embodiments, hard mask 28 may be removed, andthe resulting structure is shown in FIG. 1M. In alternative embodiments,hard mask 28 is removed in a later step, such as in a step after thestep shown in FIG. 1O, and before the step shown in FIG. 1P.Non-permeable layer 42 is formed on the top surface and sidewalls of theprotruding nano-wire 26. Non-permeable layer 42 is formed of a materialthat is not permeable by oxygen (O₂). The thickness of non-permeablelayer 42 is also great enough to block the penetration of oxygen, andthe thickness may be between about 1 nm and about 5 nm in accordancewith exemplary embodiments. Non-permeable layer 42 has a shape of a cap,with a top portion, and a ring portion underlying and connected to thetop portion. The ring portion encircles low-viscosity spacer 38.

The structure in FIG. 1M may then go through a local oxidation process,during which the structure in FIG. 1M is placed in an oxygen-containingambient, and is heated. The oxygen-containing ambient may compriseoxygen (O₂), for example. In the local oxidation, the respective wafermay be heated to an elevated temperature between about 450° C. and about1,000° C. The local oxidation may be performed for a period of timebetween about 1 minutes and about 100 minutes. In other embodiments, theoxidation is performed through a chemical oxidation at a lowtemperature, for example, using a chemical oxidizing agent or anoxidizing plasma. During the local oxidation, non-permeable layer 42prevents oxygen from penetrating, and hence the portion of nano-wire 26protected by non-permeable layer 42 is not oxidized. As a result of thelocal oxidation, the oxygen penetrates through the top portion ofdielectric layer 40, and hence a middle portion of nano-wire 26 isoxidized to form oxide ring 44, which encircles, and extends into,nano-wire 26. The oxidized middle portion is close to the interfacebetween non-permeable layer 42 and dielectric layer 40. Oxide ring 44extends beyond the respective sidewalls of nano-wire 26. The resultingnano-wire 26 thus includes a first portion over oxide ring 44, a secondportion underlying oxide ring 44, and a third portion encircled by oxidering 44. The first portion and the second portion of nano-wire 26 mayhave a similar horizontal width W1, while the third portion has a secondhorizontal width W2 smaller than horizontal width W1. Oxide ring 44 maybe in contact with the underlying low-viscosity layer 38 and theunderlying non-permeable layer 42.

As a result of the local oxidation, the generated oxide ring 44 has avolume greater than the volume of the oxidized portion of nano-wire 26.Oxide ring 44 is hence expanded in volume over the oxidized portion ofnano-wire 26, generating tensile strain 46 in nano-wire 26. During theoxidation, low-viscosity spacer 38 is at least slightly softened, andhence it is easier for nano-wire 26 to have the shape change and volumechange, and hence the tensile strain 46 is easy to be generated.Low-viscosity spacer 38 thus acts as the lubricant for the generation oftensile strain 46. Tensile strain 46 may be as high as about 2G Pascalto about 8G Pascal in accordance with simulation results. The formationof low-viscosity spacer 38 can be omitted if the strained is desirableto be concentrated in the upper part (drain side) of the respectivetransistor.

Next, referring to FIG. 1O, the top portion of non-permeable layer 42,which portion is over nano-wire 26, is removed. If hard mask 28 (FIG.1L) has not been removed yet, it may also be removed at this stage. Thesidewall portion of non-permeable layer 42 encircling the top portion ofnano-wire 26 may be left un-removed. FIG. 1P illustrates the doping ofthe top portion of nano-wire 26 to form source/drain region 48, whereinthe doping step may be achieved by implanting an n-type impurity.Source/drain region 48 may be heavily doped to an impurity concentrationbetween about 1×10¹⁹/cm³ and about 1×10²¹/cm³. At least a portion ofnano-wire 26 encircled by gate electrode 34 is not doped in this step,which portion forms the channel of the resulting vertical MOS transistor50. Alternatively, the doping of the top portion of the wire can beperformed before the growth of the strain-generating oxide.

FIG. 1Q illustrates the formation of gate contact plug 54 andsource/drain contact plugs 52 and 56. Gate contact plug 54 may comprisea metal comprising W, Ti, Ni, Co, or the silicides thereof includingTiSi₂, NiSi₂, WSi₂, CoSi₂, or the like. Gate contact plug 54 iselectrically coupled to gate electrode 34. Source/drain contact plugs 52and 56 are electrically coupled to source/drain regions 48 and 22,respectively. MOS transistor 50 is hence formed. MOS transistor 50 is anNMOS transistor, and hence tensile strain 46 (FIG. 1N) helps improve itsdrive current Ion.

FIGS. 2A through 2G illustrate cross-sectional views of intermediatestages in the formation of an NMOS transistor in accordance withalternative embodiments. Unless specified otherwise, the materials andthe formation methods of the components in these embodiments areessentially the same as the like components, which are denoted by likereference numerals in the embodiments shown in FIGS. 1A through 1Q. Thedetails regarding the formation process and the materials of thecomponents shown in FIGS. 2A through 2G may thus be found in thediscussion of the embodiment shown in FIGS. 1A through 1Q.

The initial steps of these embodiments are essentially the same as shownin FIGS. 1A through 1I. Next, referring to FIG. 2A, low-viscosity spacer38 is formed on the sidewalls of nano-wire 26, and encircles nano-wire26. Low-viscosity spacer 38 may comprise BPSG or silicon germaniumoxide, for example. Non-permeable layer 42 is also formed, which may beformed of silicon nitride, for example. In these embodiments,non-permeable layer 42 forms a ring that encircles low-viscosity spacer38. Non-permeable layer 42 is hence referred to as non-permeable ring 42hereinafter.

Referring to FIG. 2B, dielectric layer 40 is formed, followed by a CMPstep, wherein hard mask 28 and non-permeable layer 42 may act as the CMPstop layer. Dielectric layer 40 is then recessed, as shown in FIG. 2C,followed by a local oxidation step to generate oxide regions 44, asshown in FIG. 2D. The local oxidation is performed by oxidizing a topportion (a top ring) of nano-wire 26. The top end of oxide ring 44 issubstantially level with the top surface of nano-wire 26. Oxide ring 44also extends beyond the respective sidewalls of nano-wire 26. Again, dueto the expansion in the volume of the oxidized portion of nano-wire 26,tensile stress may be generated in nano-wire 26, wherein low-viscosityspacer 38 makes the generation of the tensile stress easier. Theformation of low-viscosity spacer 38 can be omitted if the strained isdesirable to be concentrated in the upper part (drain side) of therespective transistor.

FIG. 2E illustrates the replenishment of dielectric layer 40. Next, asshown in FIG. 2F, an implantation is performed to form source/drainregion 48. Source/drain region 48 may be heavily doped to an n-typeimpurity concentration between about 1×10¹⁹/cm³ and about 1×10²¹/cm³.Contact plugs 52, 54, and 56 are then formed to finish the formation ofvertical MOS transistor 50, as shown in FIG. 2G. Alternatively, thedoping of the top portion of the transistor can be achieved prior to thegrowth of the strain-generating oxide.

FIGS. 3A through 3G illustrate cross-sectional views of intermediatestages in the formation of a vertical PMOS transistor in accordance withalternative embodiments. Unless specified otherwise, the materials andformation methods of the components in these embodiments are similar tothe like components, which are denoted by like reference numerals in theembodiments shown in FIGS. 1A through 2G. The details regarding theformation process and the materials of the components shown in FIGS. 3Athrough 3G may thus be found in the discussion of the embodiment shownin FIGS. 1A through 2G.

The initial steps of these embodiments are similar to shown in FIGS. 1Athrough 1I. Source/drain region 22 is of p-type in these embodiments.Next, referring to FIG. 3A, dielectric layer 40 is formed, followed byan etch back of dielectric layer 40. After the etch back, A top portionof nano-wire 26 is above the top surface of dielectric layer 40. Hardmask layer 60 is then formed over hard mask 28 and dielectric layer 40.Hard mask layer 60 may comprise silicon nitride in accordance with someembodiments, although different materials that are difficult for oxygento penetrate may be used. Next, as shown in FIG. 3B, hard mask 28 andthe portion of hard mask layer 60 overlapping hard mask 28 are removed,for example, in a CMP step. The top surface of nano-wire 26 is exposedthrough hard mask 60. Similar to the embodiments shown in FIGS. 1Athrough 2G, for vertical PMOS transistors, low-viscosity spacer 38 maybe formed to encircle nano-wire 26, as schematically illustrated in FIG.3B.

FIG. 3C illustrates the recess of nano-wire 26, which includes etchingnano-wire 26. Opening 62 is thus formed in hard mask 60. The top surfaceof the remaining nano-wire 26 may be substantially level with or lowerthan the bottom surface of hard mask 60. Hard mask layer 64 is thenformed as a substantially conformal layer over hard mask 60 anddielectric layer 40, and extends into opening 62. Hard mask layer 64 hasa thickness smaller than one half, and may be smaller than about 25percent, the thickness of hard mask 60. Hard mask layer 64 may comprisesilicon nitride in accordance with some embodiments, although othermaterials that are difficult for oxygen to penetrate may also be used.

FIG. 3E illustrates the removal of the horizontal portions of hard masklayer 64 (FIG. 3D), which may be achieved, for example, through ananisotropic etch step. The remaining portion of hard mask layer 64 inopening 62 forms spacer 66, which is a ring on the sidewall of hard mask60. Although spacer ring 66 and hard mask 60 may be formed of the samematerial or different materials. Since they are formed in differentprocesses, there may be a distinguishable interface between spacer ring66 and hard mask 60, regardless of whether they are formed of the samematerial or not. A portion of nano-wire 26 is exposed through the centerregion of spacer ring 66.

Next, as shown in FIG. 3F, a local oxidation is performed to oxidize thetop portion of nano-wire 26. In some embodiments, the process conditionsare chosen, so that an entirety of a top layer of nano-wire 26 isoxidized, and hence the edge portion of the resulting oxide region 44extends beyond the respective sidewalls of nano-wire 26, and extendsdirectly under hard mask 60. The edge portion of oxide region 44, whichedge portion is overlapped by hard mask 60, may also have a ring shape.Due to the expansion in the volume of the oxidized portion of nano-wire26, and further due to the fact the hard mask 60 suppresses theexpansion in the volume, a compressive stress 146 is generated innano-wire 26. After the local oxidation, the remaining components suchas contact plugs 52, 54, and 56 are formed to finish the formation ofPMOS transistor 150, as shown in FIG. 3G. In the resulting PMOStransistor 150, the remaining portion of oxide region 44 may also form aring, with source/drain contact plug 52 extending through the oxide ring44 to electrically couple to source/drain region 48.

FIG. 4 illustrates a structure that is used to simulate the tensilestress generated in NMOS transistors 50 (FIGS. 1Q and 2G). In thesimulated structure, semiconductor cap 164 is located over and connectedto nano-wire 26. The oxidation of the outer portions of semiconductorcap 164 results in oxide region 166. Portions of oxide region 166 extendunderlying and overlapped by the edge portions of semiconductor cap 164.The formation of oxide region 166 results in the expansion in volume ofthe oxidized portion of semiconductor cap 164, and hence a tensilestress is generated in nano-wire 26. The simulated result of the stressis shown as line 70 in FIG. 5, wherein the tensile stress in nano-wire26 is illustrated as a function of distance D1 (FIG. 4), whereindistance D1 is measured from the bottom of semiconductor cap 164. Theresults indicated that the tensile stress may be as high as 8G Pascal,and the stress may remain high when distance D1 is smaller than about0.02 μm. This means that the high tensile stress may be formed in thechannel of vertical NMOS transistors as long as the distance of thechannel from the bottom of semiconductor cap 164 is smaller than about0.02 μm. Line 70 is simulated with low-viscosity layer 38 (FIG. 6)surrounding nano-wire 26. If low-viscosity layer 38 is replaced by hardsilicon oxide, then the respective simulated result is shown as line 72.Compared to line 70, line 72 drops much faster than line 70 whendistance D1 increases. This means that it is more difficult to generatea high tensile stress in the channel if low-viscosity layer 38 is notformed, unless the channel is formed very close to the bottom ofsemiconductor cap 164.

FIG. 6 illustrates a structure that is used to simulate the compressivestress generated in vertical PMOS transistor 150 (FIG. 3G). In thesimulated structure, a semiconductor cap 164 is located over andconnected to nano-wire 26. The oxidation of semiconductor cap 164results in oxide region 166. Hard mask 160 is formed to suppress thevolume expansion caused by the formation of oxide region 166, and hencea compressive stress is generated in nano-wire 26. The simulated resultof the stress is shown as line 170 in FIG. 7, wherein the compressivestress in nano-wire 26 is illustrated as a function of the distance D1(FIG. 6) from the bottom of semiconductor cap 164. The results alsoindicated that the compressive stress may be as high as −8G Pascal, andthe stress may remain high when distance D1 is smaller than about 0.02μm. This means that the high compress stress may be formed in thechannel of the vertical PMOS transistor as long as the distance of thechannel from the bottom of semiconductor cap 164 is smaller than about0.02 μm. Furthermore, line 170 is simulated with low-viscosity layer 38(FIG. 6) surrounding nano-wire 26. If low-viscosity layer 38 is replacedby silicon oxide, then the respective result is shown as line 172.Compared to line 170, line 172 drops much faster than line 170 whendistance D1 increases. This means that it is more difficult to generatea high compressive stress in channel if low-viscosity layer 38 is notformed, unless the channel is formed very close to the bottom ofsemiconductor cap 164.

In accordance with some embodiments, the generated stress may beconcentrated in the channel region by adopting a semiconductor materialthat has a low Young's modulus to form the channel region. For example,as shown in FIGS. 1Q, 2G, and 3G, the channel region may include portion26C formed of substantially pure germanium or silicon germanium. Theoverlying portion 26A and underlying portion 26B of nano-wire 26 may beformed of silicon with no germanium comprised therein, or may be formedof silicon germanium, with the germanium concentration lower than inportion 26C.

FIG. 8 illustrates a structure for simulating the concentration of thecompressive stresses, wherein nano-wire portions 26A and 26B are siliconnano-wire portions, and portion 26C is a germanium nano-wire portion.The simulated stress is shown in FIG. 9. It is shown by line 80 that thestress in portion 26C is significantly greater than in neighboringportions 26A and 26B. As a comparison, if portions 26A, 26B, and 26C areall formed of silicon, then the simulated stress will be shown as line82, which shows that the compressive stress in portion 26C is notgreater than in portions 26A and 26B.

In accordance with some embodiments, a vertical MOS transistor includesa substrate and a nano-wire over the substrate. The nano-wire comprisesa semiconductor material. An oxide ring extends from an outer sidewallof the nano-wire into the nano-wire, with a center portion of thenano-wire encircled by the oxide ring. The vertical MOS transistorfurther includes a gate dielectric encircling a portion of thenano-wire, a gate electrode encircling the gate dielectric, a firstsource/drain region underlying the gate electrode, and a secondsource/drain region overlying the gate electrode. The secondsource/drain region extends into the center portion of the nano-wire.

In accordance with other embodiments, a vertical MOS transistor includesa substrate, and a nano-wire over the substrate, wherein the nano-wirecomprises a semiconductor material. A gate dielectric encircles a middleportion of the nano-wire, wherein the nano-wire has an upper portionover the middle portion. A gate electrode encircles the gate dielectric.An oxide ring extends from an outer sidewall of the upper portion of thenano-wire into the nano-wire, wherein the upper portion of the nano-wirefurther comprises a first portion over the oxide ring, a second portionunderlying the oxide ring, and a third portion encircled by the oxidering. A first source/drain region is underlying the gate electrode. Asecond source/drain region is overlying the gate electrode, wherein thesecond source/drain region extends into the center portion of thenano-wire.

In accordance with yet other embodiments, a vertical MOS transistorincludes a substrate and a nano-wire over the substrate, wherein thenano-wire comprises a semiconductor material. A gate dielectricencircles a middle portion of the nano-wire, with an upper portion ofthe nano-wire over the middle portion. A gate electrode encircles thegate dielectric. An oxide region has a portion overlapping thenano-wire. A hard mask is over the oxide region, with an opening in thehard mask and overlapping the nano-wire, wherein at least an edgeportion of the oxide region is overlapped by the hard mask. A firstsource/drain region is underlying the gate electrode. A secondsource/drain region is overlying the gate electrode, wherein the secondsource/drain region has a part in the nano-wire.

Although the embodiments and their advantages have been described indetail, it should be understood that various changes, substitutions andalterations can be made herein without departing from the spirit andscope of the embodiments as defined by the appended claims. Moreover,the scope of the present application is not intended to be limited tothe particular embodiments of the process, machine, manufacture, andcomposition of matter, means, methods and steps described in thespecification. As one of ordinary skill in the art will readilyappreciate from the disclosure, processes, machines, manufacture,compositions of matter, means, methods, or steps, presently existing orlater to be developed, that perform substantially the same function orachieve substantially the same result as the corresponding embodimentsdescribed herein may be utilized according to the disclosure.Accordingly, the appended claims are intended to include within theirscope such processes, machines, manufacture, compositions of matter,means, methods, or steps. In addition, each claim constitutes a separateembodiment, and the combination of various claims and embodiments arewithin the scope of the disclosure.

What is claimed is:
 1. A vertical Metal-Oxide-Semiconductor (MOS)transistor comprising: a substrate; a nano-wire over the substrate,wherein the nano-wire comprises a semiconductor material; an oxide ringpenetrating from an outer sidewall of the nano-wire into the nano-wire,with a center portion of the nano-wire being located between twoportions of the oxide ring; a gate dielectric comprising portions onopposite sides of a portion of the nano-wire; a gate electrodecomprising portions on opposite sides of the gate dielectric; a firstsource/drain region lower than the gate electrode; and a secondsource/drain region higher than the gate electrode.
 2. The MOStransistor of claim 1 further comprising a low-viscosity dielectricmaterial forming a ring comprising portions on opposite sides of aportion of the nano-wire, wherein the low-viscosity dielectric materialhas a softening temperature lower than a softening temperature ofsilicon dioxide.
 3. The MOS transistor of claim 2, wherein thelow-viscosity dielectric material is selected from the group consistingessentially of Boron-Doped Phospho-Silicate Glass (BPSG) and silicongermanium oxide.
 4. The MOS transistor of claim 1, wherein the nano-wirecomprises a top portion over the oxide ring, wherein a bottom surface ofthe top portion of the nano-wire is in contact with a top surface of theoxide ring, and wherein the second source/drain region comprises a topportion of the nano-wire.
 5. The MOS transistor of claim 1, wherein theoxide ring has a top surface substantially level with a top surface ofthe nano-wire, and wherein the MOS transistor further comprises anon-permeable ring encircling a portion of the nano-wire over the gateelectrode.
 6. The MOS transistor of claim 1, wherein the oxide ring hasa top surface substantially level with a top surface of the nano-wire,wherein the MOS transistor further comprises a hard mask layer, with anopening in the hard mask layer and overlapping the nano-wire, andwherein outer portions of the oxide ring is overlapped by a portion ofthe hard mask.
 7. The MOS transistor of claim 1, wherein the nano-wirecomprises: a first semiconductor layer between two portions of the gatedielectric, wherein the first semiconductor layer has a first Young'smodulus; a second semiconductor layer over the first semiconductorlayer; and a third semiconductor layer under the first semiconductorlayer, wherein the second and the third semiconductor layers have secondYoung's modulus higher than the first Young's modulus.
 8. A verticalMetal-Oxide-Semiconductor (MOS) transistor comprising: a substrate; anano-wire over the substrate, wherein the nano-wire comprises asemiconductor material; a gate dielectric comprising portions onopposite sides of a middle portion of the nano-wire, wherein thenano-wire comprises an upper portion over the middle portion; a gateelectrode encircling the gate dielectric; an oxide ring penetrating froman outer sidewall of the upper portion of the nano-wire into thenano-wire, wherein the upper portion of the nano-wire further comprisesa first portion higher than the oxide ring, a second portion lower thanthe oxide ring, and a third portion between two opposite portions of theoxide ring; a first source/drain region lower than the gate electrode;and a second source/drain region higher than the gate electrode, whereinthe second source/drain region extends into the upper portion of thenano-wire.
 9. The MOS transistor of claim 8, wherein the middle portionof the nano-wire has a tensile stress, with the stress in a longitudinaldirection of the nano-wire.
 10. The MOS transistor of claim 8 furthercomprising a low-viscosity dielectric ring over the gate electrode andunder the oxide ring, wherein the low-viscosity dielectric ringcomprises portions on opposite sides of the nano-wire, and has a top endcontacting the oxide ring, and wherein the low-viscosity dielectric ringhas a melting temperature lower than a melting temperature of silicondioxide.
 11. The MOS transistor of claim 10, wherein the low-viscositydielectric ring comprises a material selected from the group consistingessentially of Boron-Doped Phospho-Silicate Glass (BPSG) and silicongermanium oxide.
 12. The MOS transistor of claim 10, wherein thelow-viscosity dielectric ring comprises a bottom end in contact with atleast one of the gate dielectric and the gate electrode.
 13. The MOStransistor of claim 8 further comprising a non-permeable ring over andcontacting the oxide ring, wherein the non-permeable ring comprisesportions on opposite sides of the nano-wire, and has a top endsubstantially level with a top surface of the nano-wire.
 14. The MOStransistor of claim 8, wherein the nano-wire comprises: a firstsemiconductor layer between two portions of the gate dielectric, whereinthe first semiconductor layer has a first Young's modulus; a secondsemiconductor layer over the first semiconductor layer; and a thirdsemiconductor layer under the first semiconductor layer, wherein thesecond and the third semiconductor layers have second Young's modulushigher than the first Young's modulus.
 15. The MOS transistor of claim14, wherein the first semiconductor layer comprises a germanium layer,and the second and the third semiconductor layers comprise silicon andhave a smaller germanium percentage than the first semiconductor layer.16. The MOS transistor of claim 8, wherein the third portion of theupper portion of the nano-wire has a horizontal width smaller thanhorizontal widths of the first portion the second portion of the upperportion of the nano-wire.
 17. A vertical Metal-Oxide-Semiconductor (MOS)transistor comprising: a substrate; a first source/drain region having aportion in the substrate; a nano-wire over the substrate, wherein thenano-wire forms a channel region of the MOS transistor; a gatedielectric encircling the nano-wire; a gate electrode encircling thegate dielectric; a second source/drain region comprising a top portionof the nano-wire; and a dielectric region extending from an outersidewall of the second source/drain region into the second source/drainregion, wherein the second source/drain region comprises: a firstportion underlying the dielectric region; a second portion level withthe dielectric region; and a third portion overlying the dielectricregion, wherein a first horizontal dimension of the second portion issmaller than second horizontal dimensions of the first portion and thethird portion.
 18. The MOS transistor of claim 17, wherein thedielectric region forms a ring encircling the second portion.
 19. TheMOS transistor of claim 17, wherein portions of the dielectric regionoverlapped by the first portion form a ring.